Event
- Event ID
- 606
- Quality
- Description
- This incident occurred at CVD (coating vapour deposition) equipment. During operation, a vacuum pump for air discharging was turned on and by mistake silane and hydrogen gases were allowed to flow into the CVD equipment. This caused the gases to enter the air discharging pipeline made of PVC (poly-vinyl chloride), which took fire.
- Event Initiating system
- Classification of the physical effects
- Hydrogen Release and Ignition
- Nature of the consequences
- Fire (No additional details provided)
- Macro-region
- Asia
- Country
- Japan
- Date
- Main component involved?
- Compressor / Booster / Pump
- How was it involved?
- Erroneous Release & Formation Of A Flammable H2-Air Mixture
- Initiating cause
- Wrong Operation
- Root causes
- Root CAUSE analysis
- The INITIATING cause for the production of the flammable gas mixture was a wrong operation of the gas flows. The root cause of this wrong operation is unknown.
Facility
- Application
- Chemical Industry
- Sub-application
- Coating production
- Hydrogen supply chain stage
- All components affected
- CVD reactor
- Location type
- Confined
- Location description
- Industrial Area
- Operational condition
Emergency & Consequences
- Number of injured persons
- 0
- Number of fatalities
- 0
Event Nature
- Release type
- gas mixture
- Involved substances (% vol)
- H2,
silane - Presumed ignition source
- Not reported
References
- Reference & weblink
High Pressure Gas Accident Cases Database of the KHK (High Pressure Gas Safety Association): <br />
https://www.khk.or.jp/public_information/incident_investigation/hpg_inc… />
(accessed May 2025)The first entry in HIAD was coming from RISCAD, which is now closed.<br />
JRC assessment
- Sources categories
- KHK
